Tool "VA Process Master"
Reduction of adjustment time for new recipes! The tool contributes to improving the productivity of the film formation system.
The "VA Process Master" is a tool for automated process settings and controlling all thin film systems. This tool adopts a new approach to process control, delivering excellent results without operator involvement. Additionally, it enables complete automatic drift correction for the sputtering process, improving product quality. Furthermore, this tool allows our customers to create complex recipes for attractive products. 【Features】 ■ Inline measurement analysis - Average values and uniformity of thin film thickness ■ Closed-loop control - Process power output - Reactive gas supply - Magnet bar (shim settings) *For more details, please refer to the PDF document or feel free to contact us.
- Company：フォンアルデンヌジャパン
- Price：Other
